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Lifting aid for the semiconductor industry: handle wafer carriers

  • Zeilhofer HHT
  • 2 days ago
  • 2 min read


must be cleanroom-compatible, low-particle and highly precise. Fully electric manipulators and lift axes handle wafer carriers, trays and equipment ergonomically up to 1,200 kg, without compressed air. Zeilhofer Handhabungstechnik from Holzkirchen, Germany, engineers every solution to cleanroom standards.

For an overview of all types of lifting aids, see our guide Lifting aids for production and industry. Related requirements are described in the lifting aid for cleanroom and pharma.


Electropneumatic ZH90 lift axis for handling silicon rods (ingots)
Electropneumatic ZH90 lift axis for handling silicon rods (ingots)

Requirements in semiconductor manufacturing

Semiconductor manufacturing takes place in the cleanroom. Even the smallest particles or vibrations can destroy components. A lifting aid must therefore work especially controlled:


  • fully electric drives avoid exhaust air and particles.


  • finest repeatability when positioning.


  • stainless steel, smooth surfaces, easy to clean.


  • pendulum-free, smooth load guidance.


Typical applications

  • Pick up and move wafer carriers and FOUPs safely.

  • Move equipment and modules during maintenance and setup.

  • Transport carriers and magazines between process steps.

  • Position heavy components in equipment assembly.


Which system for the semiconductor industry?

For heavy vertical lifts without compressed air, the fully electric ZH90 lift axis up to 1,200 kg is suitable; for movements in space the manipulator up to 800 kg. Holders are built as individual fixtures for carriers, trays or equipment.


Ergonomics and cost-effectiveness

Even in semiconductor manufacturing, heavy lifting strains staff. Which loads are permitted is shown in load limits and the Key Indicator Method. A lifting aid reduces downtime and at the same time protects expensive components from damage. Zeilhofer is certified to ISO 9001 and TISAX Level 2 with prototype protection.


Individual engineering

Cleanroom class, handling object and cycle time differ by fab. Zeilhofer plans every lifting aid from process analysis through design and manufacturing to commissioning and service, all from a single source.


2x ZH90 lift axes with fixture for ingots
2x ZH90 lift axes with fixture for ingots

Frequently asked questions about lifting aids in the semiconductor industry

Which lifting aid is suitable for the semiconductor industry?

Fully electric manipulators and lift axes in cleanroom-compatible design. They work without compressed air, low-particle and highly precise, ideal for wafer carriers and equipment.

Are the lifting aids cleanroom-compatible?

Yes. Zeilhofer builds lifting aids in stainless steel with smooth surfaces and a fully electric drive without compressed air, matched to the respective cleanroom class.

What loads does a lifting aid in semiconductor manufacturing move?

Up to 1,200 kg depending on the system. The fully electric ZH90 lift axis reaches up to 1,200 kg, manipulators up to 800 kg, mobile lifts up to 100 kg.

Are lifting aids suitable for wafer carriers?

Yes. With an individually engineered holder, wafer carriers, FOUPs and trays can be picked up and moved safely, low-particle and low-vibration.


Your lifting aid for the semiconductor industry

Talk to our engineers about your handling object and cleanroom class. We develop the right cleanroom-compatible solution, from concept to commissioning.


 
 
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